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MPCVD Equipment, Industrial Microwave Source,Graphene Film Deposition, 2D Graphene
HY-ZG3012E uses resistance wire as electric heating source and microwave absoring material SiC embedded within the insulation as microwave heating source.
The Static Ultimate Vacuum Degree is less than 100 Pa, HY-ZG3012E can be used for many chemical process or synthesis that requires high vacuum environment.
Users can choose S type or K type thermocouple to control can measure the temperature.
HY-ZG3012E can be used for MPCVD, i.e Microwave Plasma Chemical Vapor Deposition to produce 2 dimension Graphene film.
Parameters | HY-ZG3012E | |
Power | Voltage | 380V±10V 50Hz |
Rated Power | 7KW | |
Electrical Heating Power | 3KW | |
Microwave System | Microwave Output Power | 0.10~2.80KW continuously adjustable |
Microwave Frequency | 2.45GHz | |
Microwave Leakage Prevention | microwave leakage intensity <2mW/cm2 | |
Thermal Insulation System | Tmax | 1200°C |
Working Temperature | 0~1150°C | |
Heating Space (diameter×width) |
Φ60×130mm | |
Temperature Control System | Temperature Measurement Method |
thermocouple |
Temperature Measurement Range |
0°C~1300°C | |
Temperature Control Precision |
±0.1% | |
Control System | Auto, Manual and Isothermal Controlling Mode, PLC+Touch Screen |
40 segments of programmable technical parameters, data storage and export, real-time curve data display, dynamic data display |
Atmosphere System | Static Ultimate Vacuum Degree | ≤100Pa |
Atmosphere Range | quick pre-vacuum pumping, capalble of oxidizing gas, inert gas, weak reducing gas etc. |
|
Safety System | Magnetron Alarm | over temperature alarm |
Furnace Door Protection Alarm | furnace door shutdown sensor | |
Overall Dimension | Furnace Body(L×W×H) | ca. 530×430×380mm |
Rack(L×W×H) | ca. 900×500×700mm |