Hunan Huae Microwave Technology Co., Ltd.
HUNAN HUAE MICROWAVE TECHNOLOGY CO., LTD. Leading Manufacturer of Microwave Thermotechnical Equipments
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MWCVD Tube Furnace For Producing Carbon Film, Diamond Film, High Vacuum Degree
HY-ZG1516 is tube furnaces with fast heating speed, high heating efficiency, good product consistency and a maximum operating temperature up to 1550 °C .
Work tubes are available in different sizes and materials such as quartz, corundum and mullite etc.
The recommend tube diameter is 40 millimeter.
Each of the tube furnace series can be customized to meet your exact requirments.
HY-ZG1516 can be used to produce diamond film or carbon film by MWCVD i.e microwave plasma asssited chemical vapor deposition.
| Parameters | HY-ZG1516 | |
| Power | Voltage | 220V ± 10V 50Hz |
| Rated Power | 3KW | |
| Microwave System | Microwave Output Power | 0.10~1.40KW continuously adjustable |
| Microwave Frequency | 2.45GHz | |
| Microwave Leakage Prevention | microwave leakage intensity <2mW/cm2 | |
| Thermal Insulation System |
Tmax | 1600°C |
| Working Temperature | 0~1550°C | |
| Heating Space (diameter×width) |
Φ40×130mm | |
| Temperature Control System | Temperature Measurement Method |
infrared thermometer |
| Temperature Measurement Range |
300~1800°C | |
| Temperature Control Precision | ±0.1% | |
| Control System | Auto, Manual and Isothermal Controlling Mode, PLC+Touch Screen |
40 segments of programmable technical parameters, data storage and export, real-time curve data display, dynamic data display |
| Atmosphere System | Static Ultimate Vacuum Degree | ≤100Pa |
| Atmosphere Range | quick pre-vacuum pumping, capalble of oxidizing gas, inert gas, weak reducing gas etc. |
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